TY  - BOOK
TI  - Optical and EUV lithography: a modeling perspective
AU  - Erdmann, Andreas
CY  - Bellingham, Washington
PB  - SPIE Press
PY  - 2021
PY  - 2021
LA  - English
KW  - Photolithography.
KW  - Extreme ultraviolet lithography.
KW  - Photolithography.
KW  - Extreme ultraviolet lithography.
SN  - 9781510639010
N1  - Formerly CIP.
UR  - https://katalog.fid-bbi.de/Record/181-020188428
ER  -