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| LEADER |
01080pam a2200337 i 4500 |
| 001 |
181-020188428 |
| 003 |
Uk |
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20210628080404.0 |
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210430s2021 waua b 001|0|eng|d |
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|a 020188428
|2 Uk
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|z 9781510639027
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|a StDuBDS
|b eng
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|d Uk
|e rda
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|a ukblcatcopy
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0 |
4 |
|a 686.232
|2 23
|
| 100 |
1 |
|
|a Erdmann, Andreas
|e author.
|
| 245 |
1 |
0 |
|a Optical and EUV lithography
|b a modeling perspective
|c Andreas Erdmann
|
| 264 |
|
1 |
|a Bellingham, Washington
|b SPIE Press
|c 2021
|
| 300 |
|
|
|a xxii, 351 pages :
|b illustrations ;
|c 26 cm
|
| 336 |
|
|
|a text
|2 rdacontent
|
| 337 |
|
|
|a unmediated
|2 rdamedia
|
| 338 |
|
|
|a volume
|2 rdacarrier
|
| 530 |
|
|
|a Also issued online.
|
| 504 |
|
|
|a Includes bibliographical references and index.
|
| 500 |
|
|
|a Formerly CIP.
|5 Uk
|
| 650 |
|
0 |
|a Photolithography.
|
| 650 |
|
0 |
|a Extreme ultraviolet lithography.
|
| 852 |
1 |
1 |
|a British Library
|b STI
|k (B)
|h 686.323
|
| 980 |
|
|
|a 020188428
|b 181
|c sid-181-col-blfidbbi
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SOLR
| _version_ |
1778756351035441152 |
| access_facet |
Local Holdings |
| author |
Erdmann, Andreas |
| author_facet |
Erdmann, Andreas |
| author_role |
aut |
| author_sort |
Erdmann, Andreas |
| author_variant |
a e ae |
| building |
Library A |
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|
| collection |
sid-181-col-blfidbbi |
| dewey-full |
686.232 |
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600 - Technology |
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686 - Printing & related activities |
| dewey-raw |
686.232 |
| dewey-search |
686.232 |
| dewey-sort |
3686.232 |
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680 - Manufacture for specific uses |
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Local |
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Technik |
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technology |
| footnote |
Formerly CIP. |
| format |
Book |
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Book, E-Book |
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Book, E-Book |
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Book, E-Book |
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Buch |
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Book, E-Book |
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Book |
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not assigned |
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not assigned |
| id |
181-020188428 |
| illustrated |
Illustrated |
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Bellingham, Washington, SPIE Press, 2021 |
| imprint_str_mv |
Bellingham, Washington SPIE Press 2021 |
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FID-BBI-DE-23 |
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|
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9781510639010 |
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9781510639027 |
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FID-BBI-DE-23 |
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English |
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2023-10-03T17:30:46.948Z |
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erdmann2021opticalandeuvlithographyamodelingperspective |
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British Library Catalogue |
| physical |
xxii, 351 pages; illustrations; 26 cm |
| publishDate |
2021 |
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2021 |
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Bellingham, Washington |
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SPIE Press |
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marcfinc |
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020188428 |
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marcfinc |
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No subject assigned |
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181 |
| spelling |
Erdmann, Andreas author., Optical and EUV lithography a modeling perspective Andreas Erdmann, Bellingham, Washington SPIE Press 2021, xxii, 351 pages : illustrations ; 26 cm, text rdacontent, unmediated rdamedia, volume rdacarrier, Also issued online., Includes bibliographical references and index., Formerly CIP. Uk, Photolithography., Extreme ultraviolet lithography., British Library STI (B) 686.323 |
| spellingShingle |
Erdmann, Andreas, Optical and EUV lithography: a modeling perspective, Photolithography., Extreme ultraviolet lithography. |
| title |
Optical and EUV lithography: a modeling perspective |
| title_auth |
Optical and EUV lithography a modeling perspective |
| title_full |
Optical and EUV lithography a modeling perspective Andreas Erdmann |
| title_fullStr |
Optical and EUV lithography a modeling perspective Andreas Erdmann |
| title_full_unstemmed |
Optical and EUV lithography a modeling perspective Andreas Erdmann |
| title_short |
Optical and EUV lithography |
| title_sort |
optical and euv lithography a modeling perspective |
| title_sub |
a modeling perspective |
| topic |
Photolithography., Extreme ultraviolet lithography. |
| topic_facet |
Photolithography., Extreme ultraviolet lithography. |